34057 Fabrication of Nanophotonocs Devices

ECTS points: 5

Institution: DTU

Schedule: Spring or fall term

Type of assessment: Oral examination and exercises. Oral exam (50%), homework (50%)

Responsible: Kresten Yvind, build. 344, room 010, (+45) 4525 6366

Content:

• Active photonic components. Physics and chemistry for III-V semiconductors. Crystal structure’s importance in processing. Wet and dry etching. Fabrication of nanostructures by epitaxy: MBE and MOCVD. Integrated optoelectronics and photonics. Packaging of optoelectronic components. Practical fabrication of semiconductor laser. Cleanliness and safety. Process monitoring. Process log. Understanding of cleanroom and process equipment and the components they consist of. Basic test of semiconductor lasers.

Link to course